Broadband spectroscopic rotating compensator ellipsometer

No Thumbnail Available

Files

US_5973787_A_I.pdf (164.12 KB)

Date

1999

Authors

Advisors

Journal Title

Series/Report No.

Journal ISSN

Volume Title

Publisher

Abstract

Description

Keywords

Citation

Aspnes, D. E., & Opsal, J. (1999). Broadband spectroscopic rotating compensator ellipsometer. U.S. Patent No. 5,973,787. Washington, DC: U.S. Patent and Trademark Office.

URI

http://www.lib.ncsu.edu/resolver/1840.2/1631

Degree

Discipline

Collections

Publications