Broadband spectroscopic rotating compensator ellipsometer

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dc.date.accessioned2008-10-16T13:48:24Z
dc.date.available2008-10-16T13:48:24Z
dc.date.issued1999
dc.format.extent168062 bytes
dc.format.mimetypeapplication/pdf
dc.identifier.citationAspnes, D. E., & Opsal, J. (1999). Broadband spectroscopic rotating compensator ellipsometer. U.S. Patent No. 5,973,787. Washington, DC: U.S. Patent and Trademark Office.
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.2/1631
dc.language.isoen
dc.titleBroadband spectroscopic rotating compensator ellipsometer
dc.typePatent

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