Effects of Focus Ring and External Circuit on Ion Energy and Sheath Dynamics in Electropositive Capacitively Coupled Plasmas.

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dc.contributor.advisorSteven Shannon, Chair
dc.contributor.advisorDaowen Zhang, Minor
dc.contributor.advisorMohamed Bourham, Member
dc.contributor.advisorKatharina Stapelmann, Member
dc.contributor.authorXiao, Yuhua
dc.date.accepted2023-04-07
dc.date.accessioned2023-04-12T12:30:33Z
dc.date.available2023-04-12T12:30:33Z
dc.date.defense2023-02-24
dc.date.issued2023-02-24
dc.date.released2023-04-12
dc.date.reviewed2023-03-03
dc.date.submitted2023-03-02
dc.degree.disciplineNuclear Engineering
dc.degree.leveldissertation
dc.degree.nameDoctor of Philosophy
dc.descriptionNorth Carolina State University Theses Nuclear Engineering.
dc.formatPh.D. North Carolina State University, 2023.
dc.identifier.otherdeg32264
dc.identifier.urihttps://www.lib.ncsu.edu/resolver/1840.20/40832
dc.titleEffects of Focus Ring and External Circuit on Ion Energy and Sheath Dynamics in Electropositive Capacitively Coupled Plasmas.
dcterms.extent1 online resource (xiii, 173 pages) : illustrations

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