From Novel Processes to Industry-Relevant Applications: Atomic Layer Deposition of Metal, Metal Oxide, and Metal Carbide Thin-Films.

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Title: From Novel Processes to Industry-Relevant Applications: Atomic Layer Deposition of Metal, Metal Oxide, and Metal Carbide Thin-Films.
Author: Stevens, Eric Christopher
Advisors: Gregory Parsons, Chair
Saad Khan, Member
Fanxing Li, Member
Michael Dickey, Member
Kara Peters, Graduate School Representative
Date: 2018-04-12
Degree: Doctor of Philosophy
Discipline: Chemical Engineering
URI: http://www.lib.ncsu.edu/resolver/1840.20/35382


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