Model development and inverse compensator design for high speed nanopositioning

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dc.contributor.authorSmith, Ralph C.
dc.contributor.authorSalapaka, Murti V.
dc.contributor.authorHatch, Andrew G.
dc.contributor.authorSmith, J.
dc.contributor.authorDe, Tathagata
dc.date.accessioned2006-11-14T12:43:40Z
dc.date.available2006-11-14T12:43:40Z
dc.date.issued2002
dc.format.extent124776 bytes
dc.format.mimetypeapplication/pdf
dc.format.mimetypeapplication/pdf
dc.identifier.urihttp://www.ncsu.edu/crsc/reports/ftp/pdf/crsc-tr02-25.pdf
dc.identifier.urihttp://www.lib.ncsu.edu/resolver/1840.4/547
dc.language.isoen
dc.publisherNorth Carolina State University. Center for Research in Scientific Computation
dc.relation.ispartofseriesCRSC-TR02-25
dc.relation.ispartofseriesCenter for Research in Scientific Computation Technical Report
dc.titleModel development and inverse compensator design for high speed nanopositioning
dc.typeTechnical report

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